Optical transmission measurements on glow-discharge amorphous silicon nitride films

Hydrogenated amorphous silicon nitride films have been prepared by the glow-discharge decomposition of ammonia/silane gas mixture. From optical transmission measurements in the wavelength range from 400 nm to 1100 nm refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained. A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.