Effects of substrate temperature on properties of a-$SiN_x$:H films

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@article{68bccdcacc5a4365bbf9b554dbc56028,

title = "Effects of substrate temperature on properties of a-\$SiN\_x\$:H films",

author = "H{\"u}seyin Tolunay and Tayyar G{\"u}ng{\"o}r",

year = "2002",

language = "T{\"u}rk{\c c}e",

volume = "26",

pages = "269--275",

journal = "Turkish Journal of Physics",

issn = "1300-0101",

publisher = "TUBITAK",

number = "4",

}