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Optical transmission measurements on glow-discharge amorphous silicon nitride films

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23 Citations (Scopus)

Abstract

Hydrogenated amorphous silicon nitride films have been prepared by the glow-discharge decomposition of ammonia/silane gas mixture. From optical transmission measurements in the wavelength range from 400 nm to 1100 nm refractive indices absorption coefficients and optical Tauc gaps of the films have been obtained. A systematic investigation of optical parameters has been carried out as a function of the nitrogen content of samples.

Original languageEnglish
Pages (from-to)215-222
Number of pages8
JournalTurkish Journal of Physics
Volume25
Issue number3
Publication statusPublished - 2001

Keywords

  • Hydrogenated amorphous silicon nitride
  • Optical transmission
  • Refractive index
  • Swanepoel method

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