A novel radiative substrate heater

Abdullah Ceylan; Erdal Kaynak; Şadan Özcan; Tezer Firat

A novel radiative substrate heater

Abdullah Ceylan
, Erdal Kaynak
, Şadan Özcan
, Tezer Firat

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

In this work, we have developed a new low cost radiative substrate heater for deposition of highT_c superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ∼800°C substrate temperature with it by using only one 250 W halogen projector bulb.

Original language	English
Pages (from-to)	265-269
Number of pages	5
Journal	Turkish Journal of Physics
Volume	28
Issue number	4
Publication status	Published - 2004

Keywords

Magnetron sputtering
Substrate heater
YBaCuo thin film

Cite this

@article{62e7e2566f434e949386c73aa94c2d52,

title = "A novel radiative substrate heater",

abstract = "In this work, we have developed a new low cost radiative substrate heater for deposition of highTc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ∼800°C substrate temperature with it by using only one 250 W halogen projector bulb.",

keywords = "Magnetron sputtering, Substrate heater, YBaCuo thin film",

author = "Abdullah Ceylan and Erdal Kaynak and {\c S}adan {\"O}zcan and Tezer Firat",

year = "2004",

language = "English",

volume = "28",

pages = "265--269",

journal = "Turkish Journal of Physics",

issn = "1300-0101",

publisher = "TUBITAK",

number = "4",

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TY - JOUR

T1 - A novel radiative substrate heater

AU - Ceylan, Abdullah

AU - Kaynak, Erdal

AU - Özcan, Şadan

AU - Firat, Tezer

PY - 2004

Y1 - 2004

N2 - In this work, we have developed a new low cost radiative substrate heater for deposition of highTc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ∼800°C substrate temperature with it by using only one 250 W halogen projector bulb.

AB - In this work, we have developed a new low cost radiative substrate heater for deposition of highTc superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ∼800°C substrate temperature with it by using only one 250 W halogen projector bulb.

KW - Magnetron sputtering

KW - Substrate heater

KW - YBaCuo thin film

UR - https://www.scopus.com/pages/publications/4944254574

M3 - Article

AN - SCOPUS:4944254574

SN - 1300-0101

VL - 28

SP - 265

EP - 269

JO - Turkish Journal of Physics

JF - Turkish Journal of Physics

IS - 4

ER -

A novel radiative substrate heater

Abstract

Keywords

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